基于PDMS微结构介质层的柔性电容式压力传感器

Flexible capacitive pressure sensor based on PDMS microstructure dielectric layer

近年来,为了满足人工智能、物联网和可穿戴设备的发展需求,高灵敏度、低成本的柔性压力传感器的设计和制备引起了研究人员的广泛关注.本文以聚二甲基硅氧烷(PDMS)四棱柱微结构薄膜作为传感器的介质层,以银纳米线-聚对苯二甲酸乙二醇酯(AgNW-PET)透明导电膜作为传感器的上下电极层,制备了一种具有“三明治”结构的柔性电容式压力传感器.采用压力装置以及电容采集装置对传感器的性能进行测试.测试结果表明,在0~0.18 kPa压强范围内,该传感器的灵敏度可达0.63 kPa^(-1),并且具有较低的迟滞性,较快的响应时间和恢复时间,以及较好的重复性和稳定性,能检测到0.73 Pa的微小压力.最后,展示了传感器在接触检测和接近感应中的应用.

In recent years,the design and the fabrication of highly sensitive and low-cost flexible pressure sensors that meet the development needs of artificial intelligence,internet of things,and wearable devices have attracted considerable research attention.In this paper,we have prepared a“sandwich”structure pressure sensor by using polydimethylsiloxane(PDMS)tetragonal microstructure film fabricated by light-curing 3D printing mold as the dielectric layer and silver nanowire-polyethylene terephthalate(AgNWs-PET)transparent conductive film as the upper and lower electrode layers.The performance of the sensor is tested with a pressure device and a capacitance acquisition device.Test results show that the sensitivity of the sensor can reach 0.63 kPa-1 in the pressure range of 0-0.18 kPa.Furthermore,the sensor secures low hysteresis,fast response time and recovery time,and high repeatability and stability.Also,it can readily detect a small pressure of 0.73 Pa.Finally,the application of the sensor to contact detection and proximity sensing is demonstrated.