银涂层节能还原炉技术的开发与大规模应用研究

Development and Large-scale Application of Silver-coated Energy-saving CVD Reactor

对现役多晶硅还原炉内壁进行增反射改性,进而使其拥有优越的近红外电磁波反射性能,是国际上重点攻关的多晶硅还原炉节能优化方向。文章提出一种还原炉内壁银涂层增反射改性方法,并在全球范围内率先将其成功应用在现役48对棒大型还原炉的节能升级上,该项成果已获得国际领先评价。由全48对棒银涂层还原炉组成的万吨级规模高纯多晶硅节能生产线现已经在青海省投产运行。银涂层节能还原炉技术突破了现役不锈钢还原炉内壁增反射改性节能技术大规模应用瓶颈,解决了困扰行业已久的高纯多晶硅低消耗生产难题,填补了多项国际空白,为我国多晶硅行业实现低碳生产探明了一条切实可行的路径。

Modifying the internal wall of a polysilicon CVD reactor to enhance its reflection performance for near-infrared electromagnetic waves is most focused globally.This paper analysed the development and large-scale application of an energy-saving CVD reactor modified with silver coatings.Our company has successfully applied silver coatings to modify the internal wall of the 98-rod stainless steel CVD reactors which are already operated to produce polysilicon,and an entire polysilicon CVD reactor hall comprising of 96-rod stainless steel CVD reactors is upgraded with silver coatings to an energy-saving production line which is world-leading up to now.Successful development of silver-coated CVD reactors has enabled production of high-purity polysilicon with lower cost,which empowers the polysilicon industry with a production path to lower carbon emissions as well.