光纤法珀差压式流量传感器设计与实验研究

Design and Experimental Study of Optical Fiber Fabry-Perot Differential Pressure Flow Sensor

基于流体流动的节流原理,以孔板作为节流装置,2支光纤法珀压力传感器作为差压信号测量装置,研制了1种高精度光纤流量传感器。通过孔板两端压力传感器的压力差来测量流量,在质量流量测量范围0~100 g/s内,得到关于流量和压差开方的线性方程,其线性拟合准确度达到0.99995。研制的光纤流量传感器具有耐高温、抗电磁干扰、体积尺寸小巧、传感器端无源、测量精度高等优点。

Based on the principle of fluid flow throttling,a high-precision optical fiber flow sensor was developed,with orifice plate as throttling device and two optical fiber Fabry-Perot pressure sensors as differential pressure signal measuring devices.The flow rate is measured by pressure differential across pressure transducers across the orifice plateIn the mass flow measurement range of 0~100 g/s,the linear equation of the flow rate and the square root of the pressure difference was obtained,and the linear fitting accuracy reached 0.99995.The developed optical fiber flow sensor has the advantages of high temperature resistance,electromagnetic interference resistance,compact size,passive sensor end and high measurement accuracy.