化学气相沉积法制备铼材料的研究进展

Research Progress of Rhenium Prepared by Chemical Vapor Deposition

铼具有优异的物理力学性能,作为功能材料及超高温结构材料获得广泛应用。铼材料的制备方法有多种,化学气相沉积(CVD)是其主要的制备方法之一。本文简要介绍了化学气相沉积制备铼材料的反应类型、沉积条件及沉积效果,综述了CVDRe材料的沉积动力学、组织结构特征、力学性能的研究现状和典型应用,并与粉末冶金铼进行了对比分析。最后指出了目前CVDRe材料研究亟待解决的关键问题,并对进一步研究的方向和推广应用前景进行了展望。

Rhenium is widely used as functional materials and ultrahigh temperature structural materials due to its excellent physical and mechanical properties.A variety of methods have been applied to prepare rhenium materials,among which chemical vapor deposition(CVD)is one of the main techniques.The reaction type,deposition condition and effect of rhenium by CVD were introduced in the present paper.Then,the deposition dynamics,microstructure characteristics,mechanical properties and typical applications of CVD rhenium were reviewed,and compared with those of powder metallurgical rhenium.Finally,several key issues which need to be solved were put forward,and the research directions and application foreground was prospected.