摘要
开发高性能的气体传感器,必须确保合格的传感器响应测试。而大多数发生在传感器表面的化学/物理过程都受到测试室内气体分布均匀性的影响。通过计算流体动力学(CFD)仿真,设计了一种气敏特性多通道测试室。首先,对测试室结构建立三维模型并采用滑移网格处理;然后,采用kω-SST和SAS湍流模型计算不可压缩条件下的Navier-Stokes方程;最后,经后处理,获得室内空气龄、流速场均匀性综合信息。结果表明:当孔径比β=0.67时,传感器表面流量覆盖率为90.41%,流速阶梯性变化对传感器稳定性影响小于4.06%,相较于其他的孔径比,对响应时间的稳定性提升了230%,为实际的测试室开发提供了理论依据。
To develop high performance gas sensors,it is imperative to ensure qualified sensor response testing.Most of the chemical/physical processes that occur on sensor surface are affected by the uniformity of the gas distribution in test chamber.A multi-channel test room for gas sensitivity characteristics is designed through computational fluid dynamics(CFD)simulation.Firstly,a three-dimensional(3D)model of the test chamber structure is established and processed by sliding mesh.Then,the Navier-Stokes equation under incompressible conditions is calculated by kω-SST and SAS turbulence models.Finally,after post-processing,uniformity comprehensive information on indoor air age,flow velocity field is obtained.The results show that when the aperture ratioβ=0.67,the surface flow coverage of the sensor is 90.41%,and influence of step change of flow velocity on the stability of the sensor is less than 4.06%.Compared with other aperture ratios,the stability of the response time is improved by 230%,which provides a theoretical basis for the actual development of test chambers.
作者
陆文佳
吴才章
李博
LU Wenjia;WU Caizhang;LI bo(College of Electrical Engineering,Henan University of Technology,Zhengzhou 450001,China;Henan Institute of Metrology,Zhengzhou 450000,China)
出处
《传感器与微系统》
CSCD
北大核心
2023年第8期30-34,共5页
Transducer and Microsystem Technologies
基金
河南省科技发展计划资助项目(222102410001)
河南工业大学自科创新基金支持计划资助项目(2020ZKCJ31)
河南省科技研发计划联合基金资助项目(222103810084)。
关键词
分布均匀性
计算流体动力学仿真
孔径比
覆盖率
uniformity of distribution
computational fluid dynamics(CFD)simulation
aperture ratio
coverage rate