射频MEMS开关寿命测试系统的设计与实现

Design and implementation of RF MEMS switch life test system

针对射频MEMS开关寿命测试成本昂贵,测试连线复杂,且随着射频MEMS开关的尺寸不断缩小,传统测试效率低、测试任务只能在实验室进行等问题,本文设计并实现了一种小型且集成化的射频MEMS开关测试系统,组建了具备信号发生、波形实时监测、寿命计算、数据记录和测试报告打印等功能的射频MEMS开关测试系统,并用该系统对某款射频MEMS开关进行了初步测试评价。结果表明该系统较好的完成了射频MEMS开关的开关电压、开关时间和冷、热寿命的测试,能够满足射频MEMS开关的测试要求,证明了该测试系统的实用性和测试工作的准确性。

For the radio frequency micro-electro-mechanical system(RF MEMS)switch life test,the cost is high,the test connection is complex,and with the size of the RF MEMS switch shrinking,the traditional test efficiency is low,and the test task can only be carried out in the laboratory.In this paper,a RF micro-electro-mechanical switch test system with functions of signal generation,real-time waveform monitoring,lifetime calculation,data recording and test report printing is set up,and a RF micro-electro-mechanical switch is tested and evaluated preliminarily with this system.The results show that the design has well completed the test of the switch voltage,switch time,cold life,and thermal life of the RF micro-electro-mechanical system switch,and can meet the test requirements of the RF microelectro-mechanical system switch,which proves the practicability of the test system and the accuracy of the test work.