一种MEMS电场传感器宽频带电场检测方法

Method for Wide-frequency-range Field Detection by MEMS Electric Field Sensor

基于MEMS(微电子机械系统)技术的微型电场传感器凭借其体积小、功耗低、可批量化制造等优点,在诸多领域得到广泛应用。MEMS电场传感器可用于静电场与交流电场检测,但目前存在电场检测频率范围较窄、测量不同频率电场灵敏度不一致的问题。对此,根据对传感器输出信号的系统性分析,提出了一种适用于宽频域电场检测的方法。理论上,在不考虑放大电路带宽限制和信号饱和的情况下,该方法检测的电场频率没有上限,并且对不同频率电场的检测灵敏度一致。实验结果显示:用该方法检测0~7 kHz频率范围内的电场,具有良好的线性度和准确度,传感器的灵敏度保持了很好的一致性,验证了该方法的合理性。

Electric field microsensors(EFM)based on MEMS technology have been widely used in many fields because of their advantages of miniaturization,low power consumption and mass production.The MEMS EFM can be applied to measure electrostatic field and AC electric field.However,at present,there are some problems,such as narrow frequency range of detectable electric field and inconsistent sensitivity when measuring electric fields with different frequencies.Therefore,according to the systematic analysis of the output signal of the EFS,a method for wide-frequency-range field detection by MEMS EFM was proposed.Theoretically,there was no upper limit to the electric field frequency detected by this method when the bandwidth limitation of the amplifier circuit and the saturation of the signal were not regarded with,and the sensitivity was consistent when measuring electric fields with different frequencies.Experimental results show that the sensitivity of the sensor keeps ideal consistency.Good linearity and accuracy are obtained when the MEMS EFM using this method is applied to detect the electric field with the frequency range of 0~7 000 Hz.The results verify the rationality of the proposed method.