轮廓仪法测量大镜面及纳精度表面轮廓仪研发

Method on the Surface Profiler Testingfor Large Mirrors and Nano-Accuracy Surface Profiler(NSP)

指出了表面轮廓仪法检测大尺寸光学反射镜的重要意义,论述高精度表面轮廓仪系列分类。新的第3代表面轮廓仪NSP研发解决了较深弯曲反射镜的超高精度测试难题。当ELCOMAT 3000/10自准直仪在50 mm固定距离精密较正后,NSP即可能达到50 nrad rms检测精度。

This indicates the importance of surface profiler development and the briefing of a series of surface profiler for testing large mirrors in the paper.The third generation surface profiler,the nano-accuracy surface profiler(NSP)has been developed to solve ultraprecise metrology challenges of strong curved mirrors.When ultraprecise calibration date of the ELCOMAT 3000/10 at 50 mm distance is ready,the NSP will be able to reach 50 nrad rms accuracy.