微等离子体氧化TiO_(2)薄膜的研究进展

Research Progress in Micro Plasma Oxidation of TiO_(2) Films

微等离子体氧化TiO_(2)薄膜耐磨性好,抗腐蚀强,硬度高及良好的生物相容性,广泛应用在生物医学,光催化,功能材料等领域。本文综述了微等离子体氧化TiO_(2)薄膜的研究发展及应用,文章首先介绍了微等离子体氧化技术在国内外发展历程,然后阐述了微等离子体氧化TiO_(2)薄膜机理,分析了微等离子体氧化TiO_(2)薄膜制备的影响因素,阐述了对氧化TiO_(2)薄膜的应用领域,最后针对微等离子体氧化TiO_(2)薄膜发展应用的问题和不足,对其未来发展趋势提出可行性的建议。

Micro plasma oxidation TiO_(2) film has good wear resistance,strong corrosion resistance,high hardness and good biocompatibility,and is widely used in biomedical,photocatalysis,functional materials and other fields.In this paper,the research development and application of micro plasma oxidation of TiO_(2) films are reviewed.First,the development history of micro plasma oxidation technology at home and abroad is introduced,then the mechanism of micro plasma oxidation of TiO_(2) films is described,the influencing factors of micro plasma oxidation of TiO_(2) films are analyzed,and the application fields of oxidized TiO_(2) films are described.Finally,the problems and shortcomings in the development and application of micro plasma oxidation of TiO_(2) films are pointed out,Propose feasible suggestions for future development.