氮化铝粉体制备技术研究进展及展望

Research Progress and Prospect of Aluminum Nitride Powder Preparation Technology

目前,氮化铝(AlN)粉体的主要制备方法包括碳热还原法、直接氮化法、自蔓延高温合成法、化学气相沉积法和等离子体合成法,而碳热还原法和直接氮化法是工业化制备高端氮化铝粉体的主要方法。然而,由于现有制备方法自身的技术壁垒和国外的技术封锁,国产氮化铝粉体品质亟待提高。相比于现有氮化铝粉体制备方法,利用高温、富氮、稳定的纯氮层流等离子体束制备高端氮化铝粉体为高端氮化铝粉体制备提供了新思路,也是有望提高国产氮化铝粉体品质的新方法。

At present,the main preparation methods of aluminum nitride(AlN)powders include the carbothermal reduction method,direct nitride method,self-propagation high temperature synthesis method,chemical vapor deposition method and plasma synthesis method.The carbothermal reduction method and direct nitride method are the main methods of industrial preparation of high-end AlN powders.However,due to the technical barriers of the existing preparation methods and the foreign technical blockade,the quality of domestic AlN powders urgently awaits to enhance.Compared with the existing preparation methods,a new idea for the preparation of high-end AlN powders is proposed by using the pure nitrogen laminar plasma jet,which could provide high temperature,rich nitrogen and stable preparation environments.It is also a new method to improve the quality of domestic AlN powders.