一种新型磁粉检测用试片槽深的校准方法及不确定度评定

A new calibrating method and uncertainty evaluation of the groove depth for magnetic particle detection

针对当前接触式测量磁粉检测用试片槽深的方法自动化程度偏低和探针无法探测试片槽深底部的现状,结合非接触式测量原理并以光学形貌仪为主标准器,提出了一种磁粉检测用试片槽深的校准方法,同时完成了校准结果的不确定度评定,且结果满足技术要求。

In view of the current situation that the automation degree of the contact measurement of the groove depth for magnetic particle detection is low and the probe cannot detect the bottom of the groove depth,a calibration method of the groove depth for magnetic particle detection is proposed by combining the non-contact measurement principle and taking the optical topography instrument as the standard.At the same time,the uncertainty evaluation of the calibration results is completed,and the results meet the technical requirements.