超声波扫描显微镜发展及应用综述

Development and Application of Scanning Acoustic Microscope

超声波扫描显微镜是一种利用超声波为传播媒介的无损检测成像设备,相对于传统的破坏性检测,超声显微镜不会对样品造成损伤;主要介绍了超声波显微镜的发展现状、关键技术现状、应用领域和未来发展方向等内容;关键技术主要包括纳秒级窄脉冲产生技术、高频信号调理技术、高频聚焦式换能器研制技术和超声C扫描成像技术;应用领域主要从材料科学检测行业、半导体测试行业、新能源行业进行了详细描述;最后,对超声波扫描显微镜的发展进行了展望;随着超声波技术的发展,声频会越来越高,超声显微镜的能力将越来越大;可以预料,它与其他尖端技术结合,将会发挥出更大、更独特的作用。

A scanning acoustic microscope is a kind of non-destructive testing imaging equipment using ultrasonic wave as a media.Compared with traditional destructive testing,a scanning acoustic microscope will not cause damage to a sample.The development status,key technology status,application field and future development direction of ultrasonic microscope are introduced in this paper.The key technologies mainly include a nanosecond narrow pulse generation technology,high frequency signal conditioning technology,high frequency focusing transducer development technology and ultrasonic C-scan imaging technology.The application is mainly described in detail from material science testing industry,semiconductor testing industry and new energy industry.Finally,the development of scanning acoustic microscope is prospected.With the development of ultrasonic technology,the frequency of sound will be higher and higher,and the power of ultrasonic microscope will be larger and larger.Combined with other cutting-edge technologies,it can be expected that it will play a bigger and more unique role.