超灵敏度真空检漏技术进展

The Development of Ultrasensitive Leak Detection Technology

文章主要介绍国内外超灵敏度真空检漏技术的现状与发展。超灵敏度真空检漏是指对小于10^(-12)Pa·m^(3)/s的漏率进行检测的技术,它是高可靠长寿命真空器件封装的重要诊断手段。当前普通商用检漏仪受质谱分析下限和微小电流测量下限等因素的限制,其实际检漏下限一般为10-11 Pa·m^(3)/s量级,采用软件修正后显示的检漏下限可达10^(-12)Pa·m^(3)/s量级。为了解决对微小漏率的超高灵敏度检测,国际上自上世纪60年代开始相关技术研究,主要围绕检漏下限的延伸和检漏精度的提高两方面开展工作。国内突破了多项技术难题,最新研制出下限为5×10^(-16)Pa·m^(3)/s的超灵敏度真空检漏仪,并将检漏结果的合成标准不确定度减小到15%以内。

The present situation and development of ultrasensitive leak detection technology in the world is introduced in this paper.The leak detection with leakage rate less than 10^(-12)Pa·m^(3)/s is called ultrasensitive leak detection,which is an important development to solve the leak detection requirement of long life and high reliability vacuum devices.Due to the limitation of the lower limit of mass spectrum analysis and micro current measurement of general commercial leak detector,the lower limit of actual leakage measurement is 10-11 Pa·m^(3)/s,and the lower limit of leak detection can reach 10^(-12)Pa·m^(3)/s after software correction.In order to achieve ultrasensitive leak detection,the international research on relevant technologies began in the 1960s,mainly focusing on the extension of the lower limit of leak detection and the improvement of leak detection accuracy.China has broken through many technologies in ultrasensitive leak detection.The lower limit of leak detection has reached 5×10^(-16)Pa·m^(3)/s,and the combined standard uncertainty of leak detection results has been reduced to less than 15%.