溅射工艺参数对氧化铌涂层微观结构与耐蚀性的影响

Effects of Preparation Process Parameters on Microstructure and Corrosion Resistance of Niobium Oxide Coatings

为揭示溅射工艺参数对氧化铌涂层耐蚀性的影响规律,采用直流反应溅射技术在AZ31镁合金表面制备了不同工艺参数的氧化铌涂层,并通过扫描电镜和电化学工作站对涂层进行微观结构及耐蚀性测试。结果表明:氧气流量对涂层微观结构的影响不显著,但涂层的耐蚀性随氧气流量的增加而降低;当溅射功率由60 W增大到100 W时,涂层表面的致密性变差,甚至出现裂纹,耐蚀性则先增强后减弱;随着沉积时间由180 min增加到420min,涂层的厚度增加、致密性下降,对基底的腐蚀保护效果先增强后减弱。

The niobium oxide coatings with various process parameters were prepared on AZ31 magnesium alloy using DC reactive sputtering technology to reveal the influence of sputtering deposition parameters on the corrosion resistance of niobium oxide coatings.Microstructure and corrosion resistance of the layer were tested with SEM and electrochemical workstations.The results showed that the effects of oxygen flow rate on the microstructure of the coating were not significant,while the corrosion resistance of the layer decreased with the increase in oxygen flow rate.When the sputtering power increased from 60 W to 100 W,the density of the coating surface gradually decreased,even with cracks appearing on the coating surface,and the corrosion resistance first increased and then decreased.As the deposition time increased from 180 min to 420 min,the coating exhibited increased thickness,reduced density,and a corrosion protection effect that first enhanced and then weakened.