西安市电子企业芯片制备工艺职业病危害预评价及关键岗位防控措施分析

Pre-assessment of occupational hazards in chip preparation process and analysis of prevention and control measures for key posts in an electronic enterprise in Xi'an City

目的 对西安市电子企业芯片制备工艺进行分析评价,通过职业病危害程度预判提出关键岗位及防控措施,在项目可研阶段予以落实,更好的保护劳动者职业健康。方法 2022年采用检查表法、类比法、工程分析法相结合的原则对芯片制备过程产生的职业病危害因素进行辨识分析,结合人员作业方式及预期接触水平,对拟采取的职业病防护措施进行分析评价。结果 除清洗区作业人员接触硫酸、过氧化氢浓度低于职业接触限值外,其余作业人员接触毒物浓度均低于10%的职业接触限值,接触噪声的8 h等效声级强度均<80 dB(A),接触非电离辐射或电离辐射强度均远小于职业接触限值。结论西安市芯片制备工艺设备自动化程度高,密闭性好,正常生产过程,作业人员接触职业病危害因素浓度较低,但化学因素种类复杂,涉及高毒、酸碱类物质,存在急性中毒、化学灼伤等风险,应重点关注急性事故下的应急救援措施及应急设施,做好预防保障。

Objective To analyze and evaluate the chip preparation process of electronic enterprise in Xi'an City,put forward key posts and prevention and control measures through the prediction of occupational disease hazards,and implement them in the feasibility study stage of the project,so as to better protect the occupational health of workers.Methods The principle of combining checklist,analogy and engineering analysis was used to identify and analyze the occupational hazard factors generated during chip preparation,and the proposed occupational disease prevention measures were analyzed and evaluated in combination with the operation mode and expected exposure level of personnel.Results Except that the concentrations of workers exposed to sulfuric acid and hydrogen peroxide in the cleaning area were lower than the occupational exposure limits,the concentrations of other workers exposed to toxic substances were lower than the occupational exposure limit of 10%,the equivalent sound level intensity of 8 hours of exposure to noise was<80 dB(A),and the intensities of exposure to non ionizing radiation and ionizing radiation were far lower than the occupational exposure limits.Conclusion The chip preparation process equipment has high automation,good airtightness and normal production process,the concentration of occupational hazard factors exposed to operators is low,but the chemical factors are complex,involving highly toxic,acid and alkali substances,and there are risks of acute poisoning and chemical burns,so it is necessary to focused on the emergency rescue measures and emergency facilities in case of acute accidents,and improve the prevention and protection.