白光干涉仪在测量中的常见问题及解决方式

Common Problems and Solutions of White Light Interferometer in Measurement

白光干涉仪广泛应用于各类微纳米台阶高度、微观表面形貌以及表面粗糙度测量。本文从外部使用环境、被测件表面、仪器自身参数设置、设备维护等几个方面,分析可能引起白光干涉仪测量结果不准确的原因,并结合使用情况,提出相应的建议,从而提高测量结果准确性。

White light interferometer is widely used.It can measure all kinds of micro and nano steps height,micro surface topography and suface roughness measurement.This peper analyzes the possible causes of inaccurate meas-urement results from the aspects of external use environment,the surface of the measured part,the parameter setting of the instrumer iself,and equipment maintenance,and puts forw ard corresponding suggestions combined with the use situation,so as to improve the accuracy of measurement results.