摘要
This article studies a third-order trajectory planning method for point-to-point motion.All available instances for third-order trajectory planning are first analyzed.To distinguish those,three criteria are presented relying on trajectory characteristics.Following that,a fast preprocessing approach considering the trajectory as a whole is given based on the criteria constructed and system constraints.Also,the time-optimality of the trajectory is obtained.The relevant formulas are derived with the combination of geometrical symmetry of trajectory and area method.As a result,an accurate algorithm and its implementation procedure are proposed.The experimental results show the effectiveness and precision of the proposed method.The presented algorithm has been applied in semiconductor manufacturing equipment successfully.