摘要
A new precision rotary piezoelectric(PZT)actuator is proposed to improve its drive performance.Based on piezoelectric technology,the actuator adopts the principle of bionics,with a new method of stator inner anchor/loosen/rotor outer drive and a distortion structure of a thin shelf flexible hinge.This structure improves the stability of the anchor/loosen and step rotary.Its characteristics are evaluated by finite element analysis.The experiment shows that the new rotary PZT actuator works with higher frequency(40 Hz),higher speed(325 mrad/s),wider movement(360u),high resolution(1 mrad/step)and high torque(30 N?cm).The novel actuator can be applied in wide movement and high resolution driving devices such as those for optics engineering,precision positioning and some other micro-manipulation fields.
基金
supported by the Hi-Tech Research and Development Program of China (No.2002AA423150)
the National Natural Science Foundation of China (Grant No.50475010).
