热反射率校准系数与温度的相关性研究

Study on temperature dependence of thermoreflectance calibration coefficient

为验证热反射热成像测温中温度对热反射率校准系数(CTR)的影响,采用一套热反射热成像测温装置在较宽的温度范围内对由硅衬底和金组成的被测件进行两种空气热对流条件下的测试。热反射热成像测温装置采用530 nm波长LED作为光源;在20~90℃范围内以10℃为间隔分别测量被测件表面金和硅的CTR;采用一个小风扇改变空气热对流。发现空气热对流较强时,CTR在高温段快速减小;空气热对流较弱时,CTR在高温段减小速度放缓,认为主要原因是较强的空气热对流会导致测温装置镜头受热而引起测温装置读数降低。试验结果证明,来自测温装置控温平台的较高温度会引起CTR测量结果偏低。

In order to verify the influence of temperature on thermoreflectance calibration coefficient(CTR),a thermoreflectance thermography setup was used to test a DUT consisting of Si substrate and Au under two kinds of air thermal convention conditions.A 530 nm wavelength LED was used as the light source of the thermoreflectance thermography setup;the CTR of Si and Au was measured between 20-90℃in steps of 10℃,respectively;a little fan was used to change the air thermal convention.It was revealed that CTR reduced rapidly under higher temperature conditions when the air thermal convention is strong;when the air thermal convention is suppressed,the downward trend of CTRwas slowing down,the reason were due to that the strong air thermal convention would heating the lens and cause the reduce of counts of the measurement setup.The results show that the high temperature from experiment setup itself would cause lower CTR measurement results.