激光玻璃测厚仪校准装置及校准方法的研究

Research on Calibration Device and Calibration Method of Laser Glass Thickness Gauge

根据激光玻璃测厚仪的工作原理,设计了一款新型激光玻璃测厚仪校准装置,有效解决了该类型仪器的量值溯源问题。为满足不同模式的校准要求,对校准装置中使用的标准器规格、材质进行研究,对标准器的量值溯源和各标准器的组合进行分析,并设计了适应校准过程的校准平台。另外对激光玻璃测厚仪的校准方法进行了论述研究,最后对校准过程中测量示值误差的不确定度进行了分析与评定。

According to the working principle of laser glass thickness gauge,a new calibration device for laser glass thickness gauge is designed,which effectively solves the problem of traceability of the measurement value of this type of instrument.In order to meet the calibration requirements of different modes,the specifications and materials of the standard used in the calibration device are studied,the quantity traceability of the standard and the combination of each standard are analyzed,and a calibration platform suitable for the calibration process is designed.In addition,the calibration method of laser glass thickness gauge is discussed and studied.Finally,the uncertainty of measurement indication error in the calibration process is analyzed and evaluated.