洁净厂房用化学过滤器的性能检测

Performance Test of Chemical Filter for Clean Workshop

随着半导体产业的发展,洁净厂房的环境控制比以往更加严格。在一般通风过滤的应用中,气体过滤的使用和需求越来越多。现如今,环境空气中存在着大量可能影响工业生产的有害气体,人们也逐渐认识到使用专业的气体过滤装置能够解决或缓解这一类问题。国内对化学过滤器的检测大多局限于阻力、初始过滤效率和容污量的测试[1-2],与真实的市场检测需求有着很大的差距。描述了化学过滤器供应商对产品交付客户前大多进行的测试项目,包括污染物释放测试,压降曲线测试,初始去除效率测试,容污量测试和保持力测试,并根据检测中出现的问题给出合适的解决方案,从而全面准确地提供化学过滤器的性能参数。

With the development of semiconductor industry,the environmental control of clean workshop is stricter than before.In the application of general ventilation and filtration,the use and demand of gas filtration are more and more.Nowadays,there are a lot of harmful gases in the ambient air that may affect industrial production,people have gradually realized that using professional gas filtration devices can solve or alleviate this kind of problems.The detection of chemical filters in our country is mostly limited to the test of pressure drop,initial filtration efficiency and pollutant capacity,which is far from the real market testing demand.This paper describes the test items that chemical filter suppliers mostly carry out before delivering products to customers,including pollutant release test,pressure drop curve test,initial removal efficiency test,pollutant capacity and retention test,and gives appropriate solutions according to the problems in the detection,so as to provide the performance parameters of the chemical filter comprehensively and accurately.