激光表面毛化对Ti/K9玻璃扩散焊接头性能的影响

Effect of Laser Texturing Technology on Joint Properties of Ti to K9 Glass Diffusion Bonding

针对Ti与K9玻璃因化合键差异难以形成有效连接的问题,采用纳秒激光毛化处理工艺改变Ti表面结构,实现了其与K9玻璃的真空扩散连接。通过光学显微镜、扫描电子显微镜、X射线衍射仪和万能试验机等分析测试技术手段对激光表面毛化后的Ti表面及Ti/K9玻璃接头的微观组织形貌、物相组成以及力学性能进行表征。结果表明,Ti经激光毛化处理后,形成横纵交错的刻痕,刻痕附近发生熔化再结晶产生凸起,并伴随Ti-O化合物及Ti-N化合物生成;随着激光加工次数增加,Ti-N化合物含量增加而Ti-O化合物含量减少,接头剪切强度呈现先升高后降低的趋势,表明Ti-N化合物含量过多会引起接头强度降低;当激光扫描次数为15次时,接头剪切强度达到最大值,为13.1 MPa;经能谱分析,在Ti/K9界面处伴随有Ti、Si等元素的扩散和化学反应。采用激光蚀刻技术有助于增强元素的活性,在一定程度上促进了元素扩散和化学结合。

For the problem that Ti and K9 glass are difficult to form an effective bonding due to the difference of chemical bonds,nanosecond laser texturing of Ti developed with which the diffusion bonding of Ti and K9 glass was achieved.The microstructure,phase composition,and mechanical properties of laser-textured Ti and Ti/K9 glass joint were characterized by optical microscope(OM),scanning electron microscope(SEM),X-ray diffractometer(XRD),and universal material testing machine.The results show that the interconnected networks were produced on the Ti surface after laser texturing,where melting and recrystallization occurred,with the formation of Ti-O and Ti-N compounds.With the increase of laser processing times,the content of Ti-N compounds was increased while the content of Ti-O compounds was decreased,and the shear strength of the joint increased first then decreased which indicates that the over-increased Ti-N compounds resulted in the decrease of the joint strength.The maximum shear strength of 13.1 MPa was obtained when the 15th laser processing was adopted.The energy dispersive scanning(EDS)analysis showed that chemical reaction and atomic diffusion among Ti,Si,and other elements between Ti and K9 glass at the bonding interface were detected.Laser texturing Ti is helpful to enhance the activity of elements,which helps promote elemental diffusion and chemical reaction.