干涉式集成光学陀螺关键技术及应用前景分析

Key technologies and application prospect analysis of interferometric of integrated optical gyro

干涉式集成光学陀螺仪利用光电子集成技术实现陀螺系统的芯片化,在实现高性能的同时,可实现批量化生产,满足低体积、重量、功耗和成本(SWa P+C)指标,在无人领域具有重要应用前景。根据干涉式集成光学陀螺的发展脉络及趋势,设计了基于氮化硅的低损耗波导环和单偏振波导谐振腔、异质波导集成耦合结构等关键部件,搭建了基于无源芯片与光纤环的干涉式集成光学陀螺实验样机,实现精度0.03°/h(Allan方差),为目前国内已有报道同类陀螺系统的最优精度。最后,给出了干涉式集成光学陀螺的应用前景分析。

The integrated interferometric optical gyroscope(IOG)is a chip-based inertial sensor device based on optoelectronic integration technology.While achieving high performance,it can also realize mass production and meet low SWaP+C(Size Weight and Power,plus Cost,volume,weight,power consumption and cost)requirement,which holds great application potential in the unmanned field.According to the development course and trend of IOG,the key components such as low loss waveguide ring,single polarization waveguide resonator and heterogeneous waveguide integrated coupling structure based on silicon nitride are designed,and the prototype of interferometric IOG based on passive integrated chip and fiber ring is built.A bias stability of 0.03°/h is achieved,to the best of our acknowledge,which is the best domestic result for the gyros of the same type.Finally,the application prospect analysis of interferometric IOG is presented.