低粒子高真空插板阀的检测方法研究

Research on the Detection Method for Low Particle Vacuum Valve

低粒子高真空插板阀因选用材料的特殊性和密封技术的先进性,在运行过程中产生的机械冲击力就会较小,从而大大地减少了颗粒污染。它是常用于集成电路的晶圆生产行业的一类真空阀门,而目前国内厂家还无法生产这类阀门,也没有进行相关的设计研发。为此研究了基于光散射法的低粒子高真空插板阀的粒度检测方法及相应的检测指标,搭建了相关的粒度检测平台,并进行了模拟测试。

Due to the particularity of the selected materials and the advanced sealing technology,the low particle high vacuum gate valve will generate less mechanical impact during operation,thus greatly reducing particle pollution.It is a class of vacuum valves commonly used in the wafer production industry of integrated circuits,and domestic manufacturers are still unable to produce such valves,and there is no relevant design development.Therefore,the particle size detection method and corresponding detection index of low particle high vacuum insert plate valve based on light scattering method are studied,and the relevant particle size detection platform is built,and simulation tests are carried out.