压电力传感器中晶轴偏转产生的维间耦合研究

Study on Inter-Dimensional Coupling Arising from Crystal Axis Deflection in Piezoelectric Force Sensors

针对压电式石英力传感器的维间耦合现象,从敏感材料测量原理出发开展研究。结合优化算法,以控制维间耦合为目标,建立了石英晶轴偏转与传感器维间耦合的公式关系,计算了石英晶轴偏转角度的容差范围,并通过有限元仿真验证了公式精度。结果表明,晶轴偏转对传感器维间耦合影响较大,建立的公式在一定范围内可较高精度地计算维间耦合输出,为高精度压电传感器的研究提供了参考。

The study on the inter-dimensional coupling phenomenon of piezoelectric quartz force sensor is carried out based on the measurement principle of sensitive materials in this paper.Combining optimization algorithms with the goal of controlling inter-dimensional coupling,a formula relationship between quartz crystal axis deflection and sensor inter-dimensional coupling is established.The tolerance range of quartz crystal axis deflection angle is calculated,and its accuracy is verified through finite element simulation.The results indicate that the crystal axis deflection has a significant influence on the inter-dimensional coupling of sensors,and the established formula can accurately calculate the inter-dimensional coupling output within a certain range,which provides a reference for the research of high-precision piezoelectric sensors.