集成电路用NTC热敏电阻温度计校准方法研究

Investigation on Calibration Method of NTC Thermistor Thermometer Applied to Integrated Circuit Research on Calibration Method of NTC Thermistor Thermometer Used in Integrated Circuit

针对集成电路在21~23℃范围内近mK量级测温精度的需求,研究了负温度系数(negtive temperature coefficient,NTC)热敏电阻温度计的校准方法对集成电路测温系统精度的影响。利用比较法对24支3种不同型号的NTC热敏电阻温度计进行校准,使用最小二乘法进行基本方程、Hoge-1方程、Steinhart-Hart方程的系数计算,分析校准方程的内插残差,评价低阶精准校准方程的可行性,为集成电路制作工艺的高质量中的温度测控提供技术支撑。结果表明:基本方程、Steinhart-Hart方程、Hoge-1方程残差的标准偏差分别为2.29、0.63、0.65 mK;使用2个校准点的基本方程的性能最差,使用3个校准点的校准方程的Hoge-1方程表现出最好的内插性能,在集成电路窄温区温度精确测量方面具有较高的应用价值。

Aiming at the requirement of near mK temperature measurement accuracy of intgrated circuit(IC)in the range of 21~23℃,the influence of the calibration method of negtive temperature coefficient(NTC)thermistor thermometer on the temperature measurement accuracy of IC is studied.The coefficients of the Basic,Hoge-1,and Steinhart-Hart equations are calculated using the least-squares method,and the interpolation residuals of the calibration eqution are analyzed to evaluate the feasibility of the low-order accurate calibration equation for high-quality temperature measurement and control of IC fabrication processes.The results show that the standard deviations of the residuals of the Basic equation,Steinhart-Hart equation,and Hoge-1 equation are 2.29 mK,0.63 mK,and 0.65 mK,respectively;the Basic exponential eqution with two calibration points has the worst performance,and the Hoge-1 equation with three calibration points shows the best interpolation performance,which is valuable for accurate temperature measurement in narrow temperature regions of IC.