摘要
阐述硅基微结构材料在界面光学调控中的应用,包括多种平面光学结构设计在宽谱透反射的特性,目标是实现一种具有高抗反射性质以及便于微加工的硅基光学抗反射膜。
This paper describes the application of silicon-based microstructure materials in interface optical regulation,including the characteristics of various planar optical structure designs in wide spectral transmission and reflection.The goal is to achieve a silicon-based optical antireflection film with high antireflection properties and easy micromachining.
作者
仝香
TONG Xiang(Jiangsu Huai'an Technician College,Jiangsu 223001,China)
出处
《电子技术（上海）》
2023年第7期36-38,共3页
Electronic Technology
关键词
硅基光子学
抗反膜
微加工技术
silicon based Photonics
antireflection film
micromachining technology
