激光陀螺表面多层膜微结构表征与分析

Characterization and Analysis of Surface Multilayer Microstructure of Laser Gyro

本文针对激光陀螺长期稳定性技术研制要求,通过透射电子显微镜(TEM)、扫描电子显微镜(SEM)、扫描透射电镜(STEM)、聚焦离子束刻蚀(FIB)、X射线光电子能谱(XPS)以及X射线能量散射谱(EDX)等微观结构和组分表征技术,对激光陀螺反射镜的微观结构和组分进行表征,研究反射镜在不同镀制工艺条件及高低温等外部工作条件下,反射镜膜层界面、膜-基界面以及膜层本身微结构特性的变化规律,建立反射镜微结构特性和不同变化之间的映射关系。本研究结果为激光陀螺表面多层膜的结构表征提供坚实的实验参考和理论依据。

Given the development requirements of long-term stability technology of laser gyro,this research aims to characterize the microstructure and components of the laser gyro mirror via a series of characterization techniques,including transmission electron microscopy(TEM),scanning electron microscopy(SEM),scanning transmission electron microscopy(STEM),focused ion beam etching(FIB),X-ray photoelectron spectroscopy(XPS)and X-ray energy scattering spectroscopy(EDX).The changes of the mirror film interface,film-based interface,and the film itself under different plating process conditions and external working conditions were systematically explored,and the mapping relationship between the microstructure characteristics and different changes of the mirror was further revealed.The results of this study provide an experimental reference and a theoretical basis for the further design of solar-driven water decomposition photocatalyst for the structure characterization of laser gyro surface multilayer films.