科氏效应微机械陀螺的驱动结构优化设计

Optimal design of driving structure of Coriolis effect micromachined gyroscope

科氏力影响微陀螺的检测输出,从而影响陀螺仪的实际工作性能。以一种4自由度微陀螺为研究对象,在推导动力学方程的基础上,采用复指数法求解驱动及检测方向的幅频响应;考虑驱动结构参数对科氏力的影响,通过无量纲化及约束条件确定驱动结构参数范围;在检测结构优化的基础上,结合响应面法和遗传算法对驱动结构进行优化。结果表明:科氏力与驱动结构的频率特性有关,驱动质量比与结构频率比对科氏力具有较显著的影响。优化驱动结构参数后,方案A的灵敏度提高了1.419%,牺牲了6.009%的带宽;方案B灵敏度提高了0.616%,而带宽下降较少。

Coriolis force affects the detection output of a micro-gyroscope and further effect the actual working performance of the gyroscope.A four degree of freedom micro-gyroscope is taken as the research object,and the dynamic equations are derived.The complex exponential method is used to solve the amplitude responses in the driving and detection direction.The influence of driving structure parameters to the Coriolis force is considered,and the range of driving structure parameters is determined by dimensionless processes and constraint conditions.Based on the optimization of the detection structure,the driving structure is optimized by combining the response surface method and genetic algorithm.The results show that the Coriolis force is related to frequency characteristics(structural parameters)of the driving structure,and the driving mass ratio and structural frequency ratio have a significant influence on the Coriolis force.After optimizing driving structure parameters,the sensitivity of the scheme A is increased by 1.419%and the bandwidth is sacrificed by 6.009%.The sensitivity of the scheme B is improved by 0.616%,while the bandwidth decreases less.