空间强约束条件下电涡流传感器特性影响分析

Analysis of Influence of Eddy Current Sensor Characteristics Under Strong Spatial Constraints

针对快速控制反射镜中电涡流传感器因空间强约束影响使用性能的问题,采用有限元分析方法,建立了基于快速控制反射镜的差动式电涡流传感器仿真模型,对涡流传感器被测面大小受限时的测量结果进行了仿真与分析。结果表明:当因快速控制反射镜内部音圈电机和柔性支撑贴近电涡流传感器导致传感器的被测面半径从满足3倍测头半径压缩到1倍时,电涡流传感器的灵敏度降低了47%,非线性误差增大了96%。但电涡流传感器的测量值在量程范围内保持单调变化,对传感器非线性进行校正后仍可实现快速控制反射镜的角度测量。

In order to solve the problem that the performance of eddy current sensor in the fast steering mirror is affected by spatial strong constraint,a differential eddy current sensor simulation model based on the fast steering mirror was established using the finite element analysis method,and the measurement results of eddy current sensor when the measured surface size was limited were simulated and analyzed.The results show that the sensitivity of the eddy current sensor decreases by 47%and the nonlinear error increases by 96%when the radius of the measured object of the sensor is compressed from 3 times the radius of the probe to 1 times due to the close proximity of the voice coil motor and the flexible support inside the fast steering mirror to the eddy current sensor.However,the measured value of the eddy current sensor remains monotonous within the range,and the angle measurement of the fast steering mirror can still be achieved after correcting the nonlinearity of the sensor.