摘要
针对国内开展集成电路装备验证线技术研究需求,介绍了集成电路装备行业发展现状,梳理分析集成电路装备领域的国际标准、国家标准和行业标准的制定发布情况,给出集成电路薄膜生长、离子注入、扩散等装备验证标准制修订建议。
Through investigating and surveying the techonology on integrated circuit equipment verification line,this article analyzes the current situation of integrated circuit equipment.International standards,national standards and industry standards are sorted and listed.In addition,the advice for formulating and revising standards is given.
出处
《信息技术与标准化》
2023年第9期37-40,共4页
Information Technology & Standardization
关键词
装备验证线
标准适用性
集成电路
euqipment verification line
standard applicability
integrated circuit
