Safe Delivery Resource(SDS)技术进展

Safe Delivery Resource(SDS)Technology Progress

Safe Delivery Resource(SDS)是针对大规模集成电路制造工艺所用砷烷、磷烷、乙硼烷、三氟化硼等电子特种气体而开发的一种微负压储运和应用技术。SDS技术的出现克服了传统高压存储电子特种气体存在泄漏风险的难题。SDS技术所用吸附剂从微孔沸石分子筛到球形树脂基活性炭再到单块碳,每一次吸附材料的转变都显著提升单位体积气体介质的存储容量。目前,第四代SDS技术电子特种气体容量在满足长时间、高通量应用的同时进一步完善了其安全性。

Safe Delivery Resource(SDS)is a subatomspherical pressure storage,transportation and application technology for electronic special gases,such as arsine,phosphine,diborane and boron trifluoride,used in large-scale integrated circuit manufacturing process.The emergence of SDS technology overcomes the problem that traditional high pressure storage of electronic special gas leakage risk.The adsorbents used in SDS technology vary from microporous zeolite to spherical resin-based activated carbon,and then to monolithic carbon,each transition of adsorption material led the storage capacity per unit volume of the gaseous medium increased significantly.At present,the electronic special gas capacity of the fourth generation SDS technology meets the long-term and high throughput application,and improve its safety at the same time.