我国高纯气体包装气瓶发展现状及挑战

Development Status and Challenge of High Purity Gases Cylinder in China

介绍常见高纯气体气瓶结构类型以及在国内发展历程,高纯气体气瓶已经实现国产化。针对每种结构类型高纯气体气瓶,介绍了国内外设计制造标准、制造工艺,重点介绍了高纯气瓶在材料、后处理工艺方面的特点,内壁粗糙度R_(a)<0.2μm,水分含量达到(0.2~1.0)×10^(-6)。随着高纯气体的发展,在高镍合金气瓶、后处理工艺等方面需要进一步研究,同时指出高纯气瓶测试环节制约了国内高纯气瓶发展。

This paper introduces the structural types of common high purity gas cylinders and their development in China.The high purity gas cylinders have been localized.For each structural type of high-purity gas cylinder,the design and manufacturing standards and processes at home and abroad are introduced,with emphasis on the characteristics of high purity gas cylinders in terms of materials and post-treatment processes.The roughness of the inner wall R_(a)<0.2μm and the moisture content reaches(0.2~1.0)×10^(-6).With the development of high purity gas,the convenience of high-nickel alloy gas cylinder and post-treatment process needs further research,and it is pointed out that the testing of high purity gas cylinder restricts the development of high purity gas cylinder in China.