小型带电粒子发射枪的研发

Development of Compact Emission Guns for Charged Particles

本文介绍了电子和氩离子两种不同电荷的小型发射枪,根据电子枪的用途,以电荷中和低能量电子枪、脉冲式电子枪和高能量电子枪为例,详细介绍了发射枪的构造、工作原理和粒子轨迹。根据氩离子的产生方式,介绍了冷阴极离子枪、热阴极离子枪和等离子体源。掌握小型带电粒子发射枪的原理和构造,可以针对基础科研、半导体产业、生命科学和国防航天领域的具体应用进行产品开发。

The basic principles,particle trajectories and structures of the compact emission guns for electrons and argon ions are introduced respectively.The typical electron guns are used for charge neutralization,pulse emission and high energy electron diffraction.The types of argon ion gun are usually classified to cold cathode,hot cathode and plasma sources.The compact emission guns are playing important roles in the development and application of scientific research,semiconductor industry,life sciences,defense and aerospace.