金刚石薄膜场发射特性研究现状

Research status of field emission properties of diamond thin films

金刚石薄膜具有负电子亲合能、高热导率和极强的化学惰性等优势,作为场发射材料引起了广泛关注。回顾了金刚石薄膜的分类,介绍了氢化金刚石薄膜具有的负电子亲合能特性,分析了金刚石薄膜场发射特性的影响因素,列举了场发射特性的优化方向,并总结了文献中报道的金刚石薄膜与其他材料复合获得的场发射阴极的性能,对于分析和改进金刚石薄膜器件场发射性能具有重要意义。

With the advantages of negative electron affinity energy,high thermal conductivity and extreme chemical inertness,diamond thin films have attracted much attention as field emission materials.This paper reviewed the classification of diamond films,introduced the negative electron affinity properties of hydrogenated diamond films,analyzed the factors affecting the field emission characteristics of diamond films,listed the optimization direction of field emission characteristics,and summarized the performance of field emission cathode obtained by diamond films combined with other materials reported in the literature.It is of great significance to analyze and improve field emission performance of diamond thin film devices.