曝光时不同载具对光敏玻璃通孔工艺的影响

Effect of Different Carriers During Exposure Process on the Through-Glass Via Formation Process of Photosensitive Glass

基于光敏玻璃,采用紫外光曝光、热处理以及湿法刻蚀方法制备出玻璃通孔,研究了曝光过程中不同反射率载具对玻璃通孔工艺的影响,揭示了光敏玻璃曝光时的改性过程。实验结果表明,曝光量相同时,反射率高的载具有益于玻璃通孔的制备。

Based on photosensitive glass,the through-glass via(TGV)was obtained by using UV exposure,heat treatment and wet etching.The effect of carriers with different reflectivity during exposure process on the formation of TGV was studied,and modification process of photosensitive glass during exposure was revealed.The experimental results showed that when the exposure amount was the same,the carrier with high reflectivity was beneficial to the formation of TGV.