摘要
本文介绍了塑封料与引线框架的粘接强度以及等离子清洗工艺的基本原理,通过等离子清洗实验,浅析了多次等离子清洗对塑封产生空洞异常的影响,分析结论对提高产品的封装可靠性提供了相应的参考依据。
This paper introduces the bonding strength between the EMC and the lead frame and the basic principle of the plasma cleaning process.Through the plasma cleaning experiment,the influence of multiple plasma cleanings on the abnormal cavity generation in the molding is briefly analyzed.The analysis conclusion provides a corresponding reference for improving the packaging reliability of the product.
作者
张进兵
李翔
崔卫兵
ZHANG Jin-bing;LI Xiang;CUI Wei-bing(TianshuiHuaTian Technology Co.Ltd.)
出处
《中国集成电路》
2023年第9期88-91,共4页
China lntegrated Circuit
基金
IC高压隔离封装技术研发及产业化(编号:22ZD6GE016)。
关键词
等离子清洗
塑封
可靠性
plasma cleaning
molding
reliability