Active tuning of Si metasurface with large area

All-dielectric metasurfaces are usually limited because of their static functionality and small scale.In this paper,we use an easy nanofabrication technique to fabricate all-dielectric metasurfaces with the advantages of having dynamic tunability and a large area.Using an anodized aluminum oxide(AAO)template as an evaporation mask,a large-area metasurface embedded in polydimethylsiloxane(PDMS)(>2 cm^(2))is fabricated.The metasurface exhibits remarkable electric dipole(ED)and magnetic dipole(MD)resonances.Based on the solvent-swelling effect of PDMS in 20%toluene,the ED/MD resonance peak shifts dynamically∼40 nm to red.So far,to the best of our knowledge,a large-area metasurface embedded in PDMS and achieved by using the AAO template method has not appeared.