多倍频程MEMS硅基微带环行器设计

Dedign of multiple frequency band Si-based MEMS microstrip circulator

作为一种基于微机电系统(MEMS)的微波磁性器件,MEMS微带环行器的核心结构是一种异质嵌套结构,即将微波铁氧体嵌入到基于晶圆级键合封装工艺的硅腔体中。相较于传统的金属薄膜微带线直接分布在铁氧体材料上的微带环行器,MEMS微带环行器具有工艺一致性好、生产效率高、性能更佳等优势。此外,常规全磁环行器在满足器件宽带高功率要求方面存在技术瓶颈,而MEMS环行器方案能够较好地解决这一问题。基于环行器结构、原理和损耗分析,结合ANSYS仿真分析,采用MEMS体硅工艺,设计了一款多倍频程微带环行器,最终实现尺寸为8 mm×8 mm×2.5 mm、工作频率为5~13 GHz、器件插损小于1 dB、电压驻波比小于1.6、隔离度大于12 dB的器件,并实现了器件的批量化制作。

As a microwave magnetic device based on micro-electromechanical systems(MEMS),the core structure of MEMS microstrip circulator is heterogeneous nesting,which ferrite is embedded ina silicon cavity based on the waferrous bond gold encapsulation process.Compared with the traditional metal film microstrip line directly distributed on ferrite materials,MEMSmicrostrip circulator has the advantages of good process consistency,high production efficiency and better performance under power.In addition,the conventinaol all magnetic circulator has a technical bottleneck in meeting the broadband and high power requirements of devices,and MEMS circulator can better solve this problem,In this paper,a multi-frequency microstrip circulator is designed,which adopts the MEMS body silicon process,and finally achieves the mass production of devices with a size of 8 mm×8 mm×2.5 mm,a working frequency of 5-13 GHz,a microwave loss of less than 1dB,a voltage standing wave ratio of less than1.6,and an isolation degree of more than 12dB.