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基于RBF的MEMS加速度计温控系统设计

Design of MEMS accelerometer temperature control system based on RBF
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摘要 针对微机电系统(MEMS)加速度计受到温度变化影响较大、产生不同程度的漂移和测量误差,难以满足工业机器人领域高精度导航的问题,提出一种提高MEMS精度的温度补偿方法。利用热电制冷器设计适用于嵌入式的温度控制系统,使MEMS传感器的工作温度相对稳定。利用MPU6050的MEMS加速度计,设计一种基于STM32主控的嵌入式温度控制系统,并通过上位机采集数据,对比分析改进径向基函数(RBF)、RBF和常规PID等算法的温控效果。结果表明:在当前的PID控制参数的条件下,改进的RBF整定效果相对于RBF-PID和经典PID,在超调量、稳态误差、调节时间等指标上,表现出更优的系统响应和控制精度,超调量降低41.3%,调整时间减低52.3%,系统对温度的控制精度约为0.04℃。 Aiming at the problem that MEMS accelerometer is greatly affected by temperature change,resulting in different degrees of drift and measurement error,which is difficult to meet the high-precision navigation in the field of industrial robot,a temperature compensation method is proposed to improve the precision of MEMS.Thermoelectric cooler is used to design embedded temperature control system suitable to make the working temperature of MEMS sensor relatively stable.An embedded temperature control system based on STM32 master controller is designed by using MEMS accelerometer of MPU6050.The data are collected by the host computer,and the temperature control effects of improved radial basis function(RBF),RBF and conventional PID algorithms are compared and analyzed.The test result shows that under the condition of current PID control parameters,the improved RBF tuning effect shows better system response and control precision in overshoot,steady-state error,adjustment time and other indicators than RBF-PID and classical PID.The overshoot is reduced by 41.3%,the adjustment time is reduced by 52.3%,and the temperature control precision of the system is about 0.04℃.
作者 李庆春 黄月 LI Qingchun;HUANG Yue(School of Mechanical and Electrical Engineering,Central South University of Forestry and Technology,Changsha 410004,China)
出处 《传感器与微系统》 CSCD 北大核心 2023年第10期88-90,94,共4页 Transducer and Microsystem Technologies
基金 湖南省自然科学基金青年基金资助项目(2020JJ5989)。
关键词 加速度计 径向基函数 恒温控制 嵌入式 微机电系统 accelerometer radial basis function(RBF) constant temperature control embedded MEMS
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