间隙式湿膜制备器校准结果不确定度分析与评定

Uncertainty Analysis and Evaluation of Calibration Results of Film Applicator Blades

本文根据JJF(石化)053-2021及JJF 1059.1-2012,对湿膜制备器校准结果的不确定度进行分析与评定。间隙深度误差的不确定度评定包括测量重复性引入的不确定度分量、电感测微仪引入的不确定度分量、平面度引入的不确定度分量及测量平台粗糙度引入的不确定度分量,扩展不确定度为U=1.5μm(k=2);间隙长度的不确定度评定包括测量重复性及数显卡尺引入的不确定度分量,扩展不确定度为U=0.1mm(k=2)。

In this paper,according to JJF(SHIHUA)053-2021 and JJF 10591-2012,the uncertainty of the calibration results of the wet film preparator is analyzed and evaluated.The uncertainty evaluation of the gap depth error includes the uncertainty component introduced by the measurement repeatability,the inductance micrometer,the flatness and the roughness of the measuring platform.The extended uncertainty is U=1.5μm(k=2).The un⁃certainty evaluation of the gap length includes the measurement repeatability and the uncertainty component intro⁃duced by the digital caliper.The extended uncertainty is U=0.1mm(k=2).