具有大行程的步进型压电致动器研究综述

Stepper piezoelectric actuators with large strokes:a review

为了克服单个压电元件工作行程有限的不足,学者们提出了各种步进运动原理,并据此设计了各种结构的步进型压电致动器。重点介绍了步进型压电致动器的3种主要类型,即尺蠖型压电致动器、超声型压电致动器和粘滑型压电致动器,分别阐述了这3种压电致动器的运动原理和发展现状,指出了存在的问题与不足。

In order to overcome the limited working stroke of a single piezoelectric element,various stepper motion principles have been proposed in recent years and various configurations of stepper-type piezoelectric actuators have been designed accordingly.The three main types of stepper piezoelectric actuators,namely the looper piezoelectric actuator,the ultrasonic piezoelectric actuator and the viscous-slip piezoelectric actuator,are highlighted,the motion principles of these three piezoelectric actuators and the current state of development of the various actuators are discussed,and the problems and shortcomings of these three stepper piezoelectric actuators are pointed out.