锆基金属有机骨架材料用于四甲基硅烷/异戊烷分离

Zirconium⁃based metal⁃organic framework for tetramethylsilane/isopentane separation

在半导体工业中,从四甲基硅烷(TMS)/异戊烷混合物中高效捕获异戊烷从而获得超高纯度的TMS是非常重要的。在本工作中,我们选择了具有笼结构的MOF-801,通过其对TMS和异戊烷吸附能力的差异,实现了TMS与异戊烷的分离。气体吸附测试结果表明,在298 K和60 kPa时,MOF-801对异戊烷吸附量为2.56 mmol·g^(-1),而其对TMS的吸附量为1.20 mmol·g^(-1)。理想吸附溶液理论(IAST)计算结果表明,MOF-801对TMS/异戊烷(95∶5,体积比)混合物的分离选择性达到105.8。而之后的液相吸附分离实验进一步验证了MOF-801的分离效果,最终可以得到体积分数大于99.98%的TMS。

In the semiconductor industry,efficient capture of isopentane from tetramethylsilane(TMS)/isopentane mixtures is very important.Herein,we chose MOF‑801 with cages to achieve the separation of isopentane from TMS by using the difference in their adsorption capacity for TMS and isopentane.The gas adsorption test results showed that the isopentane uptake amount of MOF‑801 was 2.56 mmol·g^(-1) and the TMS was 1.20 mmol·g^(-1) at 298 K and 60 kPa.Ideal adsorption solution theory(IAST)calculations showed that its separation selectivity for the TMS/isopentane(95∶5,volume ratio)mixture was 105.8.The great separation performance of MOF‑801 was further verified by the liquid‑phase adsorption separation experiments,and the purity of the obtained TMS was greater than 99.98%(volume fraction).