摘要
采用溶胶-凝胶法制备在Pt/Ti/SiO_(2)/(100)Si基片上不同厚度的BaTi_(0.99)Fe_(0.01)O_(3)(BFTO)薄膜,研究了不同薄膜厚度对BFTO薄膜的晶体结构、介电和铁电性能的影响。在薄膜厚度低于370 nm时,BFTO薄膜呈现四方相结构,而随着厚度进一步增加,薄膜的四方性降低。随着厚度的增加,有利于提高薄膜的介电常数,而铁电性能逐渐降低。在厚度为370 nm时,薄膜具有良好的铁电性能和较低的漏电流,剩余极化Pr为12μC/cm^(2),漏电流密度为2.4×10^(-6)A/cm^(2)。
BaTi_(0.99)Fe_(0.01)O_(3)(BFTO)films with different thickness were prepared on Pt/Ti/SiO_(2)/(100)Si substrate by sol-gel method.The effects of different thickness on the crystal structure,dielectric and ferroelectric properties of BFTO films were studied.The BFTO film presents a tetragonal structure when the thickness is lower than 370 nm.With the further increase of the thickness,the tetragonality of the film decreases.With the increase of thickness,the dielectric constant of the BFTO films increases gradually,but the ferroelectric property decreases gradually.When the thickness of BFTO films is 370 nm,the film has an excellent ferroelectric properties and low leakage current,and the residual polarization Pr is 12μC/cm^(2),and the leakage current density is 2.4×10^(-6)A/cm^(2).
作者
黄玲
郑博
孙琳琳
HUANG Ling;ZHENG Bo;SUN Linlin(Xijing University,Xi’an 710123,China;Weinan Normal University,Weinan 714000,China)
出处
《中国陶瓷》
CAS
CSCD
北大核心
2023年第9期28-32,共5页
China Ceramics
基金
陕西省自然科学青年基金项目(2019JQ-922)
陕西省教育厅专项科学研究计划项目(19JK0908)
渭南师范学院博士科研启动基金项目(2020RC06)。
关键词
BFTO薄膜
厚度
电性能
BFTO thin films
Thickness
Electric properties
