MoN_(x)薄膜制备及其在柔性不锈钢CIGS太阳电池中的应用

FABRICATION OF MoNx THIN FILMS AND ITS APPLICATIONS IN FLEXIBLE STAINLESS STEEL CIGS SOLAR CELLS

采用反应磁控溅射法制备MoN_(x)薄膜,研究N2流量对MoN_(x)薄膜的结构、形貌、元素组分和光电学特性的影响。通过XRD、SEM、紫外-可见分光光度计等测试,结果表明:当增大N2流量时,薄膜晶相由Mo相向Mo2N相逐渐发生改变,且薄膜的反射率也发生变化,而后利用MoN_(x)薄膜作为抑制Fe等杂质向CIGS薄膜扩散的阻挡层;XRD、SEM结果表明,MoN_(x)薄膜的引入不会影响Mo薄膜、CIGS薄膜晶体结构和形貌;此外,二次离子质谱(SIMS)表明,MoN_(x)阻挡层显著降低了CIGS薄膜中Fe的浓度,最终,将柔性CIGS太阳电池的光电转换效率由10%提升至12.5%。

MoN_(x)thin films are prepared by reactive magnetron sputtering.The effects of N2 flow on the structure,morphology,elemental composition and photoelectric properties of MoN_(x)thin films are investigated.The results show that with the flow rate of N2 increased,the crystal phase of the films gradually changes from Mo phase to Mo2N phase.The reflectivity of the films also increases with the increases of N2 flow.XPS analysis showed that the oxidation states ratio of Moδ+is increases with the increases of N2 flow.MoN_(x)is deposited on stainless steel as a diffusion barrier layer for CIGS solar cells.SIMS measurement revealed that Fe diffusion is suppressed with the MoN_(x)barrier layer.Finally,the efficiency of the flexible CIGS solar cell is increased from 10%to 12.5%.