机械特种加工教学案例:超声化学机械抛光实验

Teaching case of mechanical non-traditional machining: ultrasonic chemical mechanical polishing experiment

针对机械类本科生教学需求,以科研项目为牵引,设计了机械特种加工教学案例“超声化学机械抛光(UVCMP)实验”。通过该案例,学生可全程参与蓝宝石UVCMP正交实验的设计与实施;学习并使用原子力显微镜、扫描电镜、透射电子显微镜等大型仪器表征样品特性;对蓝宝石UVCMP作用机理进行了深入探讨。该实验有利于学生激发科研兴趣,培养科研素养,启迪创新思维。

In response to the teaching needs of undergraduate students majoring in mechanical engineering,a teaching case of“ultrasonic chemical mechanical polishing(UVCMP)experiment”for mechanical non-traditional machining was designed.It was guided by a scientific research project.Through this case,students fully participated in the design and implementation of sapphire UVCMP orthogonal experiments.They learned and used atomic force microscopy,scanning electron microscope,transmission electron microscopy and other instruments to characterize sample properties.The mechanism of sapphire UVCMP was deeply explored.This experiment is beneficial for students to stimulate research interest,cultivate scientific literacy,and inspire innovative thinking.