一种X波段硅基微流道T/R组件设计与实现

Design and implementation of an X-band silicon-based microfluidic channel T/R module

为解决相控阵雷达高集成、小型化、大功率T/R组件散热问题,设计了一种X波段硅基微流道T/R组件.该T/R组件采用三维堆叠方式,将冷却微流道嵌入硅基板中,实现一体化设计;选用四通道多功能芯片,实现多位移相、衰减功能.测试结果与理论计算吻合良好,组件的发射功率与接收增益均能达到指标要求,满足雷达系统应用需求.

In order to solve the problem of high integration,miniaturization and heat dissipation of high-pow-er T/R module of phased array radar,an X-band silicon-based microfluidic channel T/R module is designed.This T/R module adopts a three-dimensional stacking mode,and the cooling microfluidic channel is embedded in the silicon substrate to achieve an integrated design.A four-channel multifunctional chip is selected to realize the multi-digit phase-shifting and attenuation function.The test results are in good agreement with the theoretical cal-culation,and both the transmitting power and receiving gains of the module can meet the requirements of the spec-ifications,which meets the application requirements of radar systems.