基于硅谐振压力传感器的开环特性测试

Open-loop Characteristic Test Based on Silicon Resonant Pressure Sensor

谐振梁是硅谐振传感器的核心部件,其品质最终决定了传感器整体精度等级的高低。论文从硅谐振传感器开环特性的测试结果出发,利用了基于锁相放大器的开环测试系统,对谐振梁的振动特性进行了测量,得到了不同工作温度、不同激励条件下谐振梁的幅频特性曲线-温度曲线,据此分析得出测试结论,为实现闭环自激电路提供可靠依据。

The resonant beam is the core component of the silicon resonant sensor,and its quality ultimately determines the overall accuracy level of the sensor.Starting from the test results of the open-loop characteristics of silicon resonant sensors,the vibration characteristics of the resonant beam are measured by using an open-loop test system based on lock-in amplifiers.The amplitude-frequency characteristic curve-temperature curve of the resonant beam under different operating temperatures and different excitation conditions are obtained,and the test conclusions are obtained based on this,which provides a reliable basis for the realization of closed-loop self-excitation circuit.