摘要
型号为JSM-IT800(SHL)场发射扫描电子显微镜是日本电子株式会社(JEOL)所推出的扫描电镜。针对不同类型样品的表征需求,该电镜配置有多个探头和多种观察模式。如果熟练掌握这些探头与观察模式的选择与设置方式,能充分发挥该款电子显微镜的优势并能提高样品表征的质量。本文介绍了该款电子显微镜的4种观察模式,并针对不同类型的探头和观察模式,选取具有代表性的扫描电子显微镜图片进行对比,总结探头选择和观察模式的规律,供操作人员和初学者参考。
The latest Japanese electron field-emission SEM JSM-IT800(SHL)has the characteristics of multi-detectors and multi-observation modes.The selection and setting of these detectors and observation modes must be suitable.A schematic representation of the principles of four patterns was drawn.Pictures with different detectors and observation modes was took,and some rules of probe and mode selection were summarized for operators and beginners to consult.
作者
王洁如
朱笑东
Wang Jieru;Zhu Xiaodong(State Key Laboratory of Silicon and Advanced Semiconductor Materials,Zhejiang University,Hangzhou 310007,China)
出处
《分析仪器》
CAS
2023年第5期85-89,共5页
Analytical Instrumentation
