高纯及超高纯四氯化钛制备技术研究进展

Research progress of preparation technology of high purity and super high purity titanium tetrachloride

四氯化钛是钛及其化合物生产中的重要中间产品,钛工业的重要原料,有着极其广泛的应用。综述了通过除钒、蒸馏、精馏、多级精馏等方法以及这些方法的组合来制备高纯四氯化钛;阐述了在高纯四氯化钛的基础上,通过吸附、汽提、蒸馏、亚沸蒸馏、多级精馏等方法以及此类方法的组合,来制备可应用于半导体行业的超高纯四氯化钛。对超高纯四氯化钛的制备工艺进行探讨,并展望超高纯四氯化钛制备工艺的发展趋势和方向。

Titanium tetrachloride is an important intermediate product in the production of titanium and its compounds.The preparation of high purity titanium tetrachloride by vanadium removal,distillation,rectification,multistage distillation and their combination is reviewed.Based on high purity titanium tetrachloride,the super high purity Titanium tetrachloride which can be used in semiconductor industry is prepared by adsorption,stripping,distillation,subboiling distillation,multistage distillation and their combination.The preparation technology of super-high purity titanium tetrachloride was discussed,and the development trend and direction of superhigh purity Titanium tetrachloride were prospected.